발행물
컨퍼런스
Materials Research Society
2006
,
TRANSFER OF Si3N4 CANTILEVER ARRAY ON A CMOS CIRCUIT USING NEW WAFER LEVEL BONDING METHOD FOR PROBE-BASED NANO DATA-STORAGE APPLICATION
ASBEM
Fabrication of Bio-composite Drug Delivery Device Using Rapid Prototyping Technology
IEEE
Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high censity probe-based data storage
정보저장시스템학회
2005
Silicon Nitride Cantilever Array Integrated with Si Heaters and Piezoelectric Sensors for Probe-based Data Storage
Integrated Nitride Cantilever Array With Si Heaters and Piezoelectric Detectors For Nano-Data-Storage Application