Thermo-piezoelectric Si3N4 cantilever array on CMOS circuit for high density probe-based data storage
Kim YS (Kim, Young-Sik), Jang S (Jang, Seongsoo), Lee CS (Lee, Caroline Sunyong), Jin WH (Jin, Won-Hyeog), Cho IJ (Cho, Il-Joo), Ha MH (Ha, Man-Hyo), Nam HJ (Nam, Hyo-Jin), Bu JU (Bu, Jong-Uk), Chang SI (Chang, Sun-Ii), Yoon E (Yoon, Euisik)
SENSORS AND ACTUATORS A-PHYSICAL, 2007