발행물
컨퍼런스
NSTI Nanotech 2008
1970
,
Hydrogenated Silicon nanoparticles generation in plasma with pulsed hydrogen gas
PRTEC 2024
2024
THERMAL MANAGEMENT AND PROCESS ANALYSIS IN CHEMICAL MECHANICAL POLISHING
MRS 2024 fall meeting
Plasma Synthesis of 2D Materials and Their Applications to Next Generation Devices
대한기계학회 2024년 학술대회
Effect of temperature in Cu Chemical Mechanical Polishing
2024년도 한국입자에어로졸학회 학술대회
산업현장의 복합 악취 제거를 위한 저온 플라즈마 기술의 최적화