발행물
컨퍼런스
2023 대한기계학회 열공학부문 춘계학술대회
2023
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다가 전이금속 산화물의 다공성 박막 합성을 위한 저온 플라즈마
2023 한국진공학회 동계학술대회
Large Scale Synthesis and Optimization of Highly Crystalline and Multilayer MoS 2 Using a Thermal Chemical Vapor Deposition Process
2022 Materials Research Society (MRS)
2022
Oxygen Plasma Induced Heterostructure of 1T-WS2/a-WO3 with Hydrogen Spillover Effect as an Advanced HER Electrocatalyst
2022 Korean International Semiconductor Conference (KISM)
Investigation of Cleaning Effects for Nano-sized Particles on the Polished Thin Films using CO2 Gas Cluster
Development of a Membrane Process for Small Particle Removal in CMP Slurry and Post-CMP Cleaning