발행물
컨퍼런스
2022 대한기계학회 본부학술대회
2022
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세정 공정 중 발생하는 재오염 방지를 위한 카본블랙/PTFE 효과
2022 International Symposium on Contamination Control and Cleanroom Technology (ISCC)
Uniform deposition method of monodispersed SiO2 nanoparticles on a 300-mm Si wafer surface
2022 International Conference on Planarization Technology (ICPT)
Application of hydrogen-reduction to improve ceria slurry performance on chemical mechanical polishing process
Mechanochemically Enhanced Selective Material Removal during poly-Si CMP by Nanocontact-induced Dissolution
International Aerosol Conference 2022
Application of electrosprayscanning mobility particle sizer for the measurement of mixed abrasive slurry in chemical mechanical planarization process