2018

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방전 플라즈마 소결공정에서 발생하는 열전소재 내 파워팩터의 불균일성

2017

,

Evaluation of polyurethane pads properties for effective use in planarization process

2017

,

Control of silica particle deposition for fabrication of post cmp cleaning ability evaluation wafer

2017

,

In-line real-time conductivity technique for monitoring of liquid chemical concentration during semiconductor manufacturing

2017

,

A reverse selectivity ceria slurry for silicon nitride removal during CMP