2017

,

Development of novel cleaning solution for post chemical mechanical planariztion silicon wafer

2017

,

Study on defect control of CMP process caused by deposition process

2017

,

Modified Kinematic model for predicting contact points of conditioner in CMP

2017

,

Study on hydrodynamic pressure distribution in chemical mechanical polishing

2017

,

Prediction of cmp performance with slurry flow analysis on the pad surface