발행물
컨퍼런스
1st International Conference on Microelectronics and Plasma Technology
2008
,
Generation of Size and Structure Controlled Silicon Nanoparticles using Pulse Plasma for Energy Device
13th International Symposium on Chemical-Mechanical Planarization
Optimization of CMP conditioner design for non-porous pad and its application to manufacturing process
한국입자에어로졸학회 2008년도 학술대회
상압 에어로졸 분사에 의한 코팅공정 기술
TDMA(Tandem Differential Mobility Analyzer) 기법을 이용한 저압 DMA 교정
입자 중화기 종류에 따른 에어로졸 입경 분포 변화