노준석 교수 연구실
article|
인용수 242
·2023
Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible
Joohoon Kim, Junhwa Seong, Wonjoong Kim, Gun‐Yeal Lee, Seokwoo Kim, Hongyoon Kim, Seong‐Won Moon, Dong Kyo Oh, Younghwan Yang, Jeonghoon Park, Jaehyuck Jang, Yeseul Kim, Minsu Jeong, Chanwoong Park, Hojung Choi, Gyoseon Jeon, Kyung-il Lee, Dong Hyun Yoon, Namkyoo Park, Byoungho Lee, Heon Lee, Junsuk Rho
IF 38.5Nature Materials
키워드
Materials scienceNanoimprint lithographyWaferLithographyImmersion lithographyNanotechnologyOptoelectronicsFabricationPhotolithographyUltraviolet