기본 정보
연구 분야
프로젝트
발행물
구성원
review|
인용수 70
·2025
Nanofabrication for Nanophotonics
Younghwan Yang, Youngsun Jeon, Zhaogang Dong, Joel K. W. Yang, Mahsa Haddadi Moghaddam, Dai‐Sik Kim, Dong Kyo Oh, J.‐L. Lee, Mario Hentschel, Harald Gießen, Do-Hyun Kang, Gyeongtae Kim, Takuo Tanaka, Yang Zhao, Johannes Bürger, Stefan A. Maier, Haoran Ren, Wooik Jung, Mansoo Choi, Gwangmin Bae, Haomin Chen, Seokwoo Jeon, Jae‐Kyung Kim, Eunji Lee, Hyunjung Kang, Yujin Park, Dang Du Nguyen, Inki Kim, Pablo Cencillo‐Abad, Debashis Chanda, Xinxin Jing, Na Liu, Irina V. Martynenko, Tim Liedl, Young Sook Kwak, Jwa‐Min Nam, Sang-Min Park, Teri W. Odom, Hye‐Eun Lee, Ryeong Myeong Kim, Ki Tae Nam, Hyunah Kwon, Hyeon‐Ho Jeong, Peer Fischer, Jiwon Yoon, Shin‐Hyun Kim, Sang-Min Shim, Dasol Lee, Luis A. Pérez, Xiaoyu Qi, Agustín Mihi, Hohyun Keum, Moonsub Shim, Seok Kim, Hanhwi Jang, Yeon Sik Jung, Christian Roßner, Tobias A. F. König, Andreas Fery, Zhiwei Li, Koray Aydın, Chad A. Mirkin, Junhwa Seong, Nara Jeon, Zhiyun Xu, Tian Gu, Juejun Hu, Hyounghan Kwon, Hojoong Jung, Hossein Alijani, Igor Aharonovich, Joohoon Kim, Junsuk Rho
IF 16ACS Nano
초록

Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.

키워드
NanolithographyNanophotonicsNanotechnologyMaterials scienceMedicineFabrication
타입
review
IF / 인용수
16 / 70
게재 연도
2025