By using the electron-yield detection technique, the EXAFS spectra for Tb/FeCo and Tb/Fe multilayers, as well as a TbFeCo alloy and some reference thin films, have been measured. These multilayers were prepared by sputtering onto float-glass substrates, and had the total thickness of 1000Å with various individual layer thickness or period values. An electron detector obtained from the EXAFS company of F.W. Lytle was used for the measurements and the high quality of data shows that the electron-yield detection technique is especially suitable for studies of multilayers. Preliminary analysis results show some qualitative tendencies which need to be checked with more careful analyses and, if possible, with some low temperature data.