정운룡 교수 연구실
article|
인용수 0
·2026
Selection of metal–tellurium (M–Te) alloy as Recyclable Controlled Te Precursors for Wafer‐Scale Synthesis of M x Te y Thin Films
Geonwoo Kim, Jong‐Min Lee, Youngjun Park, Yoonsun Choi, C. H. Choi, Kyu‐Su Kim, Dongbeom Kim, Ik‐Soo Kim, Arup Ghorai, Donghwa Lee, Unyong Jeong
IF 12.1Small
초록
. The M-Te alloy source is recyclable by replenishing Te on the alloy, establishing this methodology as a robust and versatile platform for producing a wide range of high-quality metal telluride films.
키워드
BilayerTellurideThin filmAlloyMetalAtomic layer depositionSputteringLayer (electronics)