기본 정보
연구 분야
프로젝트
논문
구성원
article|
·
인용수 79
·2022
Amorphous Carbon Films for Electronic Applications
Ik‐Soo Kim, Chae‐Eun Shim, Sang Won Kim, Chang‐Seok Lee, Junyoung Kwon, Kyung‐Eun Byun, Unyong Jeong
IF 29.4Advanced Materials
초록

While various crystalline carbon allotropes, including graphene, have been actively investigated, amorphous carbon (a-C) thin films have received relatively little attention. The a-C is a disordered form of carbon bonding with a broad range of the CC bond length and bond angle. Although accurate structural analysis and theoretical approaches are still insufficient, reproducible structure-property relationships have been accumulated. As the a-C thin film is now adapted as a hardmask in the semiconductor industry and new properties are reported continuously, expectations are growing that it can be practically used as active materials beyond as a simple sacrificial layer. In this perspective review article, after a brief introduction to the synthesis and properties of the a-C thin films, their potential practical applications are proposed, including hardmasks, extreme ultraviolet (EUV) pellicles, diffusion barriers, deformable electrodes and interconnects, sensors, active layers, electrodes for energy, micro-supercapacitors, batteries, nanogenerators, electromagnetic interference (EMI) shielding, and nanomembranes. The article ends with a discussion on the technological challenges in a-C thin films.

키워드
Materials scienceThin filmGrapheneAmorphous solidNanotechnologySupercapacitorCarbon nanotubeAmorphous carbonExtreme ultraviolet lithographyCarbon fibers
타입
article
IF / 인용수
29.4 / 79
게재 연도
2022

주식회사 디써클

대표 장재우,이윤구서울특별시 강남구 역삼로 169, 명우빌딩 2층 (TIPS타운 S2)대표 전화 0507-1312-6417이메일 info@rndcircle.io사업자등록번호 458-87-03380호스팅제공자 구글 클라우드 플랫폼(GCP)

© 2026 RnDcircle. All Rights Reserved.