Boosting non-volatile memory performance with exhalative annealing: A novel approach to low-temperature crystallization of hafnia based ferroelectric
Yunseong Lee, Un Jeong Kim, Ki‐Hong Kim, Dong‐Jin Yun, Duk‐Hyun Choe, Sijung Yoo, Hyun Jae Lee, Seung‐Geol Nam, Sanghyun Jo, Yoonsang Park, Donghoon Kim, Dong‐Min Kim, Haeryong Kim, K.H. Shin, Sahn Nahm, Jinseong Heo