이한돌 교수 연구실
article|
인용수 0
·2025
Liquid particle monitoring system utilizing aerosol metrology and data processing algorithm: chemical mechanical polishing slurry application
Seongmin Cho, Yongjae Cho, Yusun Lee, Seungjae Gwak, Heedo Seo, Su Bin Min, Young June Won, Jung-Hun Noh, Handol Lee, Dong-Bin Kwak
IF 5.6Measurement
키워드
AerosolHYDROSOLParticle-size distributionParticle sizeSlurryParticle counterPolishingMetrology