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·2025
Single-crystalline BaTiO 3 -based ferroelectric capacitive memory via membrane transfer
Xinyuan Zhang, Sangho Lee, Jung‐El Ryu, Jun Min Suh, Tae‐Hyeon Kim, Matthew R. Barone, Nicholas Parker, G.-H. Lee, Ik‐Jyae Kim, Injune Yeo, Jiho Shin, Jang‐Sik Lee, Darrell G. Schlom, Celesta S. Chang, Jae-sun Seo, Shimeng Yu, Min‐Kyu Song, Jeehwan Kim
IF 12.5Science Advances
초록

Ferroelectric capacitive memory (FeCAP) holds enormous potential for low-power, high-density in-memory computing. While hafnia-based FeCAPs have attracted attention for their silicon compatibility, they suffer from limited performance, such as a narrow memory window and relatively high switching fields. In this work, an FeCAP device is developed on the basis of a single-crystalline barium titanate (BTO) membrane, a perovskite oxide thin film that can be epitaxially lifted off and transferred onto a silicon platform. By engineering the device structure and epitaxy process, polarization asymmetry is introduced in capacitance-voltage characteristics. The resulting BTO-based FeCAP exhibits superior memory behavior, including a wide memory window of 308 picofarads and a low switching field of 0.005 megavolts per centimeter, outperforming conventional hafnia-based FeCAPs. Furthermore, these properties are preserved after active layer transfer onto a silicon platform. This approach provides a viable pathway for high-quality BTO to integrate into industry-compatible processes and to drive progress in future logic/memory applications.

키워드
FerroelectricityEpitaxySiliconNon-volatile memoryBarium titanatePolarization (electrochemistry)Window (computing)Capacitive sensing
타입
article
IF / 인용수
12.5 / 0
게재 연도
2025

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