정재경 교수 연구실
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·2026
Crystalline IGO TFTs with High Reliability under DRAM-Compatible 600 °C N 2 Thermal Budgets
Jeong Eun Oh, Nahyun Kim, Jiwon Chae, Min Hee Cho, Daewon Ha, Jae Kyeong Jeong
IEEE Electron Device Letters
키워드
Reliability (semiconductor)ThermalCircuit reliabilitySiliconTemperature measurementLogic gateRapid thermal processingThermal resistance