기본 정보
연구 분야
프로젝트
발행물
구성원
article|
인용수 2
·2025
Interface-Engineered HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> Nanolaminate Gate Insulators for InGaZnO Thin-Film Transistors and 2T0C DRAM Applications
Sang Han Ko, Sung‐Min Yoon
IF 4.7ACS Applied Electronic Materials
초록

The effect of gate insulator (GI) structure on the device characteristics of oxide semiconductor thin-film transistors (TFTs) and the suitability of the 2T0C DRAM cell is investigated. Three types of GI are compared: single-layer HfO2, nanolaminate-stacked HfO2/Al2O3, and double-layered laminate-stacked HfO2/Al2O3. The laminate films suppressed crystallization and minimized defect formation, whereas the single-layer HfO2 films exhibited crystallization and increased oxygen-related defects. The InGaZnO TFT utilizing laminate GI structures exhibited improved subthreshold swing (SS), diminished hysteresis in drain current, improved dielectric reliability, and enhanced bias-stress stability compared to that employing the single-layer HfO2. When integrated into 2T0C DRAM cells, the laminate GI configurations were demonstrated to enable effective charge storage and data retention for longer than 103 s at low-voltage operation. These findings suggest that the laminated GI provides a promising design strategy for next-generation low-power memory devices based on oxide semiconductors.

키워드
DramMaterials scienceOptoelectronicsThin-film transistorInterface (matter)TransistorElectrical engineeringNanotechnologyLayer (electronics)Engineering
타입
article
IF / 인용수
4.7 / 2
게재 연도
2025