심기동 교수 연구실
article|
인용수 0
·2025
Mechanical characterization of Silicon‐on‐Nothing structures with nanoindentation and point-load deflection experiments
Zhuo Feng Lee, Taeyeong Kim, Kibum Jung, Jungchul Lee, Gi‐Dong Sim
Sensors and Actuators A Physical
키워드
NanoindentationDeflection (physics)ModulusElastic modulusYoung's modulusCantileverMicroelectromechanical systemsDeformation (meteorology)