정영훈 교수 연구실
Instrumentation, Metrology, and Standards for Nanomanufacturing II, Nanoscience and Engineering Symposia of the SPIE Optics and Photonics
Self-calibration of a dual-actuated single-axis nanopositioner using measurement transitivity with extensions to calibration of two-axis systems
구분
국외
국가
미국
컨퍼런스명
Instrumentation, Metrology, and Standards for Nanomanufacturing II, Nanoscience and Engineering Symposia of the SPIE Optics and Photonics
발표 제목
Self-calibration of a dual-actuated single-axis nanopositioner using measurement transitivity with extensions to calibration of two-axis systems
기관명
SPIE
참여 연도
-
상세 설명
SPIE