In this study, we developed a femtosecond pulse laser-based micro LED transfer process and optical system technology that precisely transfers micro LED chips with a size of several tens of micrometers. In order to realize the high-speed and precision transfer process of the micro LED chip, the femtosecond pulse laser was applied as a light source for the transfer process. In addition, dynamic release layer was applied to transfer micro LED chips at high speed without direct damages by laser. we analyzed the tendency of chip transfer process by adjusting the parameters for laser irradiation properties and material properties.