Effect of Sn Content on the Electrical Properties of In-Ga-Sn-O Thin-Film Transistors Fabricated Via Rf-Magnetron Sputtering
Hyunil Jo, Sumi Kim, Sung-Hoon Bae, Juhan Kim, Eunji Kim, Dong-gwan Kim, Changmin Lee, Yong-Gyu Kim, B.-S. Jeong, Taehoon Lee, Joon‐Hyung Lee, Young-Woo Heo
SSRN Electronic Journal
키워드
Materials scienceSputter depositionOptoelectronicsSputteringTransistorCavity magnetronThin-film transistorThin filmMetallurgyComposite material