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구성원
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인용수 0
·2019
Comparison imaging ellipsometry and its application to crystallization of indium oxide thin films
Sungmo Park, Jung‐Tae Lee, Hyunjin Kim, Jaekyun Kim, Suenne Kim, Ilsin An
IF 1.511Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
초록

Null imaging ellipsometry was developed to show the net change in polarization state between two samples. This system has no moving parts for nulling and does not exhibit azimuthal dependence on the optical elements. Therefore, this system is fast in data acquisition and easy to operate. In addition, image uniformity can be improved through a normalization process. For a demonstration, this system was applied to annealing studies of indium oxide thin films. The results show that this system can visualize the temperature dependence of the annealing as well as the progress of the annealing over time.

키워드
Materials scienceEllipsometryAnnealing (glass)IndiumThin filmCrystallizationOxideAzimuthOptoelectronicsSilicon
타입
article
IF / 인용수
1.511 / 0
게재 연도
2019

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