오누리 교수 연구실
preprint|
green
·인용수 0
·2025
DC-Biased PEALD and Post-annealing for High-Crystallinity HfO2 Thin Film
Hee Jun Yoon, Tae Yoon Lee, Nuri Oh, Hyeongtag Jeon
SSRN Electronic Journal
키워드
Atomic layer depositionAuger electron spectroscopyThin filmDielectricRemote plasmaX-ray photoelectron spectroscopyPlasmaLangmuir probeHigh-κ dielectricAnalytical Chemistry (journal)