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·인용수 103
·2013
Photo–Roll Lithography (PRL) for Continuous and Scalable Patterning with Application in Flexible Electronics
Jong G. Ok, Moon Kyu Kwak, Chad M. Huard, Hong Seok Youn, L. Jay Guo
IF 26.8Advanced Materials
초록

A novel nanofabrication methodology for continuous, scalable, and geometry-tunable lithography is developed, named photo-roll lithography (PRL), by integrating photolithography with rollable processing. As a flexible mask attached to a quartz cylinder containing a UV source rolls over a photoresistcoated substrate, PRL realizes continuous photolithographic fabrication of various micro/nanoscale patterns with geometry that is tunable by controlling mask-substrate motions.

키워드
PhotolithographyLithographyNanolithographyMaterials scienceFabricationNanotechnologyComputational lithographySubstrate (aquarium)Roll-to-roll processingNanoimprint lithography
타입
article
IF / 인용수
26.8 / 103
게재 연도
2013