이인환 교수 연구실
preprint|
green
·인용수 1
·2024
Remarkably Enhanced Plasma Resistance of Y2o3- and Y-Rich Thin Films Through Controllable Reactive Sputtering
Hae-Seong Jang, Kang-Bin Bae, Se-Rin Min, Yoon‐Suk Oh, In‐Hwan Lee, Sungmin Lee
SSRN Electronic Journal
키워드
SputteringPlasmaMaterials scienceThin filmResistance (ecology)Chemical engineeringOptoelectronicsComposite materialNanotechnologyPhysics