김병조 교수 연구실
International Conference on Simulation of Semiconductor Processes and Devices
Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential
구분
국외
국가
일본
컨퍼런스명
International Conference on Simulation of Semiconductor Processes and Devices
발표 제목
Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential
기관명
IEEE
참여 연도
2023
상세 설명
IEEE