김병조 교수 연구실
76th Annual Gaseous Electronics Conference
Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing
구분
국외
국가
미국
컨퍼런스명
76th Annual Gaseous Electronics Conference
발표 제목
Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing
기관명
American Physical Society
참여 연도
2023
상세 설명
American Physical Society