김병조 교수 연구실
article|
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인용수 16
·2022
Atomistic kinetic Monte Carlo simulation on atomic layer deposition of TiN thin film
Sangtae Kim, Hyungmin An, Sang-Min Oh, Jisu Jung, Byungjo Kim, Sang Ki Nam, Seungwu Han
IF 3.3Computational Materials Science
키워드
TinKinetic Monte CarloAtomic layer depositionThin filmChemical physicsMicroelectronicsDensity functional theoryMonte Carlo methodMaterials scienceDeposition (geology)