권기청 교수 연구실
78th Annual Gaseous Electronics Conference (GEC2025)
Measurement of Plasma Density Using an Electrode Sensor on Wafer in an Inductively Coupled Plasma and Comparison with Other Diagnostic Methods
구분
국내
국가
대한민국
컨퍼런스명
78th Annual Gaseous Electronics Conference (GEC2025)
발표 제목
Measurement of Plasma Density Using an Electrode Sensor on Wafer in an Inductively Coupled Plasma and Comparison with Other Diagnostic Methods
기관명
American Physical Society (APS) / GEC 조직위원회
참여 연도
2025
상세 설명
American Physical Society (APS) / GEC 조직위원회