한정환 교수 연구실
article|
인용수 56
·2013
Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials
Sang Woon Lee, Byung Joon Choi, Taeyong Eom, Jeong Hwan Han, Seong Keun Kim, Seul Ji Song, Woongkyu Lee, Cheol Seong Hwang
IF 23.5Coordination Chemistry Reviews
키워드
Atomic layer depositionChemistryNanotechnologyLimitingMetalThin filmMaterials scienceOrganic chemistry