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·2025
Restorative Effects of Low‐Temperature Post‐Sulfur Annealing on Device Performance of Monolayer MoS 2 Transistors for NMOS Inverters
Eun‐Seong Kim, Changwook Lee, Se‐Ryong Park, Jiwon Chang, Tae‐Jun Ha
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The restorative effects of sulfur (S)-passivation through low-temperature (160 °C) post-S annealing on the performance and stability of monolayer molybdenum disulfide (MoS<sub>2</sub>) field-effect transistors (FETs) are investigated. S-passivation suppresses S vacancies in the monolayer MoS<sub>2</sub> channel, restoring its intrinsic electrical and material properties and leading to enhancements in field-effect mobility from 8 to 95 cm<sup>-2</sup> V<sup>-1</sup> s<sup>-1</sup> and subthreshold swing from 0.21 to 0.10 V dec<sup>-1</sup>. Hole-trapping associated with S vacancies results in the instability of the MoS<sub>2</sub> FETs under a negative bias stress, whereas S interstitials acting as electron trap states contribute to the instability of the S-passivated MoS<sub>2</sub> FETs under a positive bias stress. The effects of S-vacancy suppression on the charge-transport properties of the MoS<sub>2</sub> FETs are assessed by analyzing their activation energies and densities of states based on the reduction in defect states by S-passivation. An N-channel metal-oxide semiconductor inverter consisting of the S-passivated MoS<sub>2</sub> FETs exhibiting improved voltage gains is demonstrated for the first time, indicating its potential application in logic circuits based on monolayer transition-metal dichalcogenides.

키워드
NMOS logicMaterials scienceAnnealing (glass)MonolayerTransistorOptoelectronicsSulfurMOSFETNanotechnologyElectrical engineering
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2025

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