AFM (Atomic Force Microscopy)
* Sample size : 40 X 40㎜ * XY scanner - Closed loop XY scan - Scan size : 30×30×6 um (for XYZ) - Resolution : < 0.2 nm RMS for XY 0.01 nm for Z * Contact mode AFM * Noncontact mode AFM * Lateral force microscopy * FD spectroscopy * Advanced Nanolithography Tool - Vector scan nanolithography - Raster scan nanolithography - Voltage lithography - Dynamic plowing mode/scratching mode/ indentation mode/ constant mod
Inkjet Patterning System(single nozzle)
* Substrate : 100 X 100㎜ * 특이사항 : Mannual ink supply system
Inkjet Patterning System (multi-nozzle)
* Head : multi Nozzle 128 Channel S-series * Stage : X step, Y Servo Stage * Repeatability : ±5㎛ * Substrate : 200 X 200㎜ * 특이사항 : Mannual ink supply system
Plasma Treatment System
* Plasma source - Capacitively coupled plasma - 600 W, 13.56 Hz * Chamber size : 6 inch (150 mm) * Substrate Cooling, Heation - Max.Temperature : 300˚c * Vacuum Pumping - Mechanical Rotary Pump * Gas Supply - Mass Flow Controller : 4 ch
3D Non-contact Surface Profiler
1. 구성 및 사용명세서 - Interferometric Objectives : 5 Lens - Z축 측정 영역 : 0-180um - Lateral Resolution : 0.2 ~4um - Tip /Tilt : ±6° - Workpiece Stage 2. 용도 - 광간섭을 이용한 3차원 표면형상 측정 - 확장된 측정 Range (5mm Option) - Auto Focus 기능(Option) - 대면적 대응 - Line Profile 기능
Contact angle analyzer ( Phoenix 300 - SEO )
- unit size : 650*300*450 - weight : 28kg - Max. sample size (L*H*W)in mm : 200x150x infinity - Zoom : 6.4 fold - Focus : Internal,+-6mm - Resolution : 768x576 NTSC, 16M color - Max measuring speed : 30 fr/s(frame grabber) or 90fr/s(Digital camera) - Dispensing type : Automatic, semi-auto & Manual control - Pendant drop analysis, Surface energy, Continuation capture images - Contact angle : 0~180 deg.,+-0.1deg. accuracy - Surface and interfacial tension : 10-1~103 mN/m - Temperature measurement : External
Oil-less Pump & Compressor
* Max. vacuum: 650mm Hg * Max. flow rate: 23L/Min * Motor Rotation: 1400RPM * Horse Power: 1/6HP * Pole: 4P * Net Weight: 5.2kg * Port Thread: 1/8PS
Viscometer
* Viscosity Range cP: 1M ~ 6M * Speeds (RPM): 0.01 ~ 200 * Numbers of Increments: 54 * Numbers of Spindles Supplied: 4 * Accuracy: ±1.0% of range * Repeatability: ±0.2%
Power Supply
* Line Regulation: 3mA * Load Regulation: 3mA - 3mA * Other Features: 3mV * Output 1, Volts/ Max, Current: 30V - 3A * Total Power: 90W * Type: DC
Function Generator
* Frequency Range: 0.3Hz to 3Hz(7 ranges) * Amplitude: >10Vp-p(into 50 ohm load) * Impedance: 50 ohm ±10% * Attenuator: -20dB±1dB x 2 * DC Offset: <-5V ~ >5V(into 50 ohm load) * Display: 6digit LED