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제 31회 한국반도체학술대회(KCS 2024)
2024
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Pt Thin Films by Atomic Layer Deposition Using Dimethyl(N,N-Dimethyl-3-Buten-1-Amine-N) Platinum and O2 Reactant towards Semiconductor Application
International Conference on Surface Engineering (ICSE2023)
2023
Mass-productive Atomic Layer Deposition for the Catalyst Synthesis toward Energy Application
Korean International Semiconductor Conference on Manufacturing Technology 2023 (KISM 2023)
Pt Thin Films by Atomic Layer Deposition Using Dimethyl(N,N-Dimethyl-3-Buten-1-Amine-N) Platinum and O2 Reactant towards the Semiconductor Application
The 21st Cross Straits Symposium
2019
Atomic layer deposition of Pt thin films using dimethyl (N,N‑dimethyl-3-butene-1-amine‑N) platinum and O2 reactant
19th International Conference on Atomic Layer Deposition
Synthesis of core shell nanocatalysts using atomic layer deposition with fluidized bed reactor for PEMFC