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논문
특허
저서
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전체 논문

49

31

Characteristics of Negative Electron Beam Resists, ma-N2410 and ma-N2405
정희준, 0
MICROELECTRONIC ENGINEERING, 2008

32

32 nm 1:1 line and space patterning by resist reflow process
정희준
Proceedings of SPIE, 2008

33

전자빔 리소그래피에서의 레지스트 내부 에너지 분포에 대한 전산모사 프로그램의 제작
정희준
이학기술연구지, 2007

34

Growth behaviour of ZnO thin films and nanowires on SrTiO3 substrates
정희준, 0, 0, 0, 0, 0, 0
SOLID STATE COMMUNICATIONS, 2007

35

Transport Properties of Coupled Semiconductor Quantum Dots
정희준
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2006

36

Investigation of Optimum Biasing and Undercut for Single Trench Alternating Phase Shift Mask in 193 nm Lithography
정희준, 0, 0, 0, 0, 0, 0, 0
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006

37

Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns
정희준, 0, 0, 0, 0, 0, 0, 0
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006

38

Semiconductor Quantum Structures for Infrared Detection Using Nano-Patterned Grating Geometry
정희준, 0
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2006

39

Optimization of Chromeless Phase Mask by Comparing Scattering Bars with Zebra Patterns
정희준
Proceeding of SPIE, vol.6154, 2006

40

A compensation of Young`s modulous in polysilicon structure with discontinuous material distribution
정희준, 0, 0, 0, 0
MATERIALS LETTERS, 2005