E-beam Evaporator
BLDG 301
Vacuum Stacking & Annealing Chamber
O2 Plasma Generator
Solar Simulator
ALD (Atomic Layer Deposition)
IAP
Maskless Photo Lithography System for GROWTH PROCESS
MOCVD for 2D Semiconductors(4-inch) (WS2, WSe2, MoS2, MoSe2)
ISRC
MOCVD for 2D Semiconductors(2-inch) (InSe, WSe2, etc)
CVD for Graphene (top) Thermal CVD for TMDs (bottom)
Probe Station & Stacking Stage