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논문·특허
구성원
Article|
·
인용수 3
·2013
Characteristics of Y2O3-doped indium zinc oxide films grown by radio frequency magnetron co-sputtering system
Young-Jun Lee, Joo‐Hyung Kim, Jangha Kang
Thin Solid Films
키워드
Materials scienceThin filmAmorphous solidSputter depositionAnalytical Chemistry (journal)Electrical resistivity and conductivitySputteringIndiumDopingCavity magnetron
타입
Article
IF / 인용수
- / 3
게재 연도
2013