발행물
컨퍼런스
2001 IEEE/LEOS International Conference on Optical MEMS
,
Addressable Electromagnetic Micromirror Array with Single Crystal Silicon Mirror Plate and Aluminum Spring
11th International Conference on Solid-State Sensors, Actuators and Microsystems
Fabrication and Experiments on Electromagnetic Micromirror Array with Bulk Silicon Mirror Plate and Aluminum Spring
IEEE/LEOS International Conference on Optical MEMS
Design and Fabrication of Electromagnetic Micromirror with Bulk Silicon Mirror Plate and Aluminum Spring
International Microprocesses and Nanotechnology Conference
Design and Fabrication of Magnetically Driven Micromirror with Large Angular Deflection
제7회 광전자 및 광통신 학술회의
알루미늄 핀-조인트를 사용한 마이크로 미러의 측정