Ultralow-dielectric-constant amorphous boron nitride
Hong, S, Lee, CS, Lee, MH, Lee, Y, Ma, KY, Kim, G, Yoon, SI, Ihm, K, Kim, KJ, Shin, TJ, Kim, SW, Jeon, E, Jeon, H, Kim, JY, Lee, HI, Lee, Z, Antidormi, A, Roche, S, Chhowalla, M, Shin, HJ, Shin, HS
NATURE, 202006