Near-field Sub-diffraction Photolithography with an Elastomeric Photomask
Sangyoon Paik, Gwangmook Kim, Sehwan Chang, Sooun Lee, Dana Jin, Kwang-Yong Jeong, I Sak Lee, Jekwan Lee, Hongjae Moon, Jae Jun Lee, Kiseok Chang, Suseok Choi, Jeongmin Moon, Soonshin Jung, Shinill Kang, Wooyoung Lee, Heon-Jin Choi, Hyunyong Choi, Hyun Jae Kim, Jae-Hyun Lee, Jinwoo Cheon, Miso Kim, Jae-Min Myoung, Hong-Gyu Park, Wooyoung Shim
Nature Communications, 2020