권혁준 교수 연구실
2025 Symposium on VLSI Technology and Circuits
High-Performance Monolithic 3D CMOS Enabled by Orientation-Aligned Seedless Laser Crystallization and Ultra-Shallow Laser Activation
구분
국외
국가
일본
컨퍼런스명
2025 Symposium on VLSI Technology and Circuits
발표 제목
High-Performance Monolithic 3D CMOS Enabled by Orientation-Aligned Seedless Laser Crystallization and Ultra-Shallow Laser Activation
기관명
Institute of Electrical and Electronics Engineers
참여 연도
2025
상세 설명
Institute of Electrical and Electronics Engineers