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인용수 5
·2025
Interaction study of copper ions and polyvinyl acetal (PVA) brush during copper post-CMP cleaning: Experimental and density functional theory study
Sanjay Bisht, Maheepal Yadav, Byung Hyun Kim, Tae‐Gon Kim, Jin Goo Park
IF 6.9 (2025) Applied Surface Science
키워드
CopperBrushIonPolyvinyl alcoholAcetalChemistryChemical engineeringDensity functional theoryInorganic chemistryMaterials science
타입
Article
IF / 인용수
6.9 / 5
원문
https://doi.org/10.1016/j.apsusc.2025.162858
게재 연도
2025