IV (Si,Ge) semiconductors
Gas cabinets (top right) with gas-leak detector & automatic valve shutters
Gas scrubber
II-VI oxide semiconductors
ZnO nanorods and nanomaterials
III-V semiconductors
Gas cabinets (right)
metal deposition
Carbon based materials synthesis
Thermal annealing
Oxygen plasma etcher
Olympus BX51
Probe station
Semiconductor parameter analyzer