A parameter study on the micro hot-embossing process of glassy polymer for pattern replication

A new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage

A novel laser micro/nano-machining system for FPD process

Development of compact high precision two degree of freedom XY piezoelectric stepping positioner

A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication

Development of compact high precision linear piezoelectric stepping positioner with nanometer accuracy and large travel range

A comparative study on damage detection in speed-up and coast-down process of grinding spindle-typed rotor-bearing system

Design of high precision linear stage with double-sided multi-segmented trapezoidal magnet array and its compensations for force ripples

High-cycle tensile-tensile fatigue performance of niobium alloy: Conventional vs wire-arc additive manufacturing