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인용수 6
·2025
Metal ion contamination and removal on oxide surfaces and polyvinyl acetal brushes during the tungsten post-CMP cleaning process
Palwasha Jalalzai, Sumit Kumar, Ranjith Punathil Meethal, Kwang-Min Han, Andreas Klipp, Tae-Gon Kim, Jin-Goo Park
IF 6.3 (2025) Surfaces and Interfaces
키워드
Materials scienceTungstenMetalContaminationTungsten oxidePolyvinyl alcoholOxideChemical engineeringMetallurgyComposite material
타입
Article
IF / 인용수
6.3 / 6
원문
https://doi.org/10.1016/j.surfin.2025.106939
게재 연도
2025