Azoles as corrosion inhibitors in alkaline medium for ruthenium chemical mechanical planarization applications:Electrochemical and theoretical analysis | 박진구 교수 연구실 | 한양대학교 차세대반도체융합공학부

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홈

연구 영역

기본 정보

논문·특허

과제

구성원

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인용수 13

·2024

Azoles as corrosion inhibitors in alkaline medium for ruthenium chemical mechanical planarization applications:Electrochemical and theoretical analysis

Nikhil Rahul Dhongde, Nipu Kumar Das, Jenasree Hazarika, Jin-Goo Park, Tamal Banerjee, Prasanna Venkatesh Rajaraman

IF 4.7 (2024) Journal of Molecular Structure

키워드

ChemistryChemical-mechanical planarizationElectrochemistryRutheniumCorrosionCombinatorial chemistryChemical engineeringNanotechnologyOrganic chemistryPhysical chemistry

타입

Article

IF / 인용수

4.7 / 13

원문

https://doi.org/10.1016/j.molstruc.2024.139651

게재 연도

2024