Polyethyleneimine polymer as an effective corrosion inhibitor for advanced node tungsten post-CMP cleaning | 박진구 교수 연구실 | 한양대학교 차세대반도체융합공학부

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·2025

Polyethyleneimine polymer as an effective corrosion inhibitor for advanced node tungsten post-CMP cleaning

Ranjith Punathil Meethal, Sumit Kumar, Maheepal Yadav, Palwasha Jalalzai, Andreas Klipp, Tae-Gon Kim, Jin-Goo Park

IF 6.9 (2025) Applied Surface Science

키워드

TungstenAdsorptionCorrosionContact angleCorrosion inhibitorX-ray photoelectron spectroscopyvan der Waals forceDielectric spectroscopy

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Article

IF / 인용수

6.9 / 1

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2025