|박진구 교수 연구실
홈
연구 영역
기본 정보
논문·특허
과제
구성원
Article|
·
인용수 27
·2023
Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application
Ranjith Punathil Meethal, Palwasha Jalalzai, Muskan, Sumit Kumar, Peter Jerome, Andreas Klipp, Tae‐Gon Kim, Jin-Goo Park
IF 9.4 (2023) Journal of Colloid and Interface Science
키워드
AdsorptionChemical-mechanical planarizationCorrosionChemistryX-ray photoelectron spectroscopyMoleculeTungstenDielectric spectroscopyContact angleLangmuir adsorption model
타입
Article
IF / 인용수
9.4 / 27
원문
https://doi.org/10.1016/j.jcis.2023.04.012
게재 연도
2023