Mechanism of Striation Formation in RF Capacitively Coupled Plasmas

Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltagesss

Combined simulation of micro and nanoparticles in RF inductively coupled plasma torches with the variations of metallic species and feeding nozzle location

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Multi-dimensional electrostatic plasma simulations using the particle-in-cell method for the low-temperature plasmas for materials processing

반도체 공정용 RF 용량성 결합 플라즈마 장비에서 발생하는 Striation 현상

Optical Diagnostics for Dual Jet Interactions of Helium Atmospheric Pressure Plasmas

Energy-Controlled Atmospheric-Pressure Micro-Plasma Using Multistep External Ballast Capacitors

A Strong Instability in the Ion Cyclotron Frequency Range of the Upward Sheared Flow of the Oxygen Ions in Aurora

Curved-boundary particle-in-cell simulation for the investigation of the target erosion effect of DC magnetron sputtering system