Effects of the wall boundary conditions of a showerhead plasma reactor on the uniformity control of RF plasma deposition
김호준, 이해준
JOURNAL OF APPLIED PHYSICS, 201708
52
Analysis of intermediate pressure SiH4/He capacitively coupled plasma for deposition of an amorphous hydrogenated silicon film in consideration of thermal diffusion effects
이해준, 김호준
PLASMA SOURCES SCIENCE & TECHNOLOGY, 201708
53
Safety of nonthermal atmospheric pressure plasma for tooth bleaching evaluated in terms of microhardness and mineral content
홍진우, 남설희, 전영찬, 이해준, 김규천
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 201708
54
The temporal evolution of the drift-cyclotron instability and anomalous ion heating in plasmas with transverse inhomogeneous electric field (vol 24, 042114, 2017)
이해준, 미카일렌코, 블라디미르
PHYSICS OF PLASMAS, 201704
55
Hydrophobic and Mechanical Characteristics of Hydrogenated Amorphous Carbon Films Synthesized by Linear Ar/CH4 Microwave Plasma
이해준, 차주홍, 김태환, 이호준, 김동현, 한문기
한국진공학회지, 201703
56
Non-Thermal Atmospheric Pressure Plasma Efficiently Promotes the Proliferation of Adipose Tissue-Derived Stem Cells by Activating NO-Response Pathways
이해준, 김도영, 한성범, 송기원, 박정연, 이현영, 김규천
SCIENTIFIC REPORTS, 201612
57
Numerical analysis of the effect of electrode spacing on deposition rate profiles in a capacitively coupled plasma reactor
김호준, 이해준
PLASMA SOURCES SCIENCE & TECHNOLOGY, 201612
58
The inhomogeneous ion temperature anisotropy instabilities of magnetic-field-aligned plasma sheared flow
미카일렌코, 블라디미르, 이해준
PHYSICS OF PLASMAS, 201611
59
2D fluid model analysis for the effect of 3D gas flow on a capacitively coupled plasma deposition reactor
이해준, 김호준
PLASMA SOURCES SCIENCE & TECHNOLOGY, 201606
60
Control of the nano-particle weight ratio in stainless steel micro and nano powders by radio frequency plasma treatment